Nanopatterned Silicon Stamps

II-VI offers a large variety of nanomachined single crystal silicon substrates providing a low-cost entry into nanophotonics research for industry and academic institutions. The substrates may be used in a variety of applications in optics, photonics, biology, chemistry, physics (e.g. neutron scattering), polymer research, nanoimprinting, microfluidics and others. If desired, the substrates can be coated with metallic or dielectric coating. Most of the surface features have slightly trapezoidal cross-section profiles with straight parallel mesas and trenches. Lattice-like structures are available as well. A number of feature sizes and trench depth is available. SEM images of the substrates may be taken prior to shipment to verify the exact profile.

Dimensions shown in the table represent target value. Period has accuracy better than 0.5% while groove depth and the width of line and space may differ from the target values by 15%. SEM are given for illustration purposes. If more precise dimensional information is required, we may provide an SEM of the specific piece of nanostamp you order as an optional service

2D Nanostamps
Part Number Period(nm) Lattice Type Groove Depth(nm) Feature Width(nm) Size(mm) SEM Link 1  Price 
S2D-18B2-0808-150-P 600 Rect Post 150 275 8.0 x 8.3   $261
S2D-18B2-0808-350-P 600 Rect Post 350 275 8.0 x 8.3   $261
S2D-18B3-0808-150-P 700 Rect Post 150 350 8.0 x 8.3 Top down $261
S2D-18B3-0808-350-P 700 Rect Post 350 350 8.0 x 8.3 Top down $261
S2D-18C2-0808-150-P 600 Hex Post 150 240 8.0 x 8.3 Top down $261
S2D-18C2-0808-350-P 600 Hex Post 350 240 8.0 x 8.3 Top down $261
S2D-18C3-0808-150-P 700 Hex Post 150 290 8.0 x 8.3 Top down $261
S2D-18C3-0808-350-P 700 Hex Post 350 290 8.0 x 8.3 Top down $261
S2D-18D3-0808-150-P 700 Hex Hole 150 200 8.0 x 8.3 Top down $261
S2D-18D3-0808-350-P 700 Hex Hole 350 200 8.0 x 8.3 Top down $261
S2D-24B2-0808-150-P 600 Rect Post  150 195 8.0 x 8.3   $261
S2D-24B2-0808-350-P 600 Rect Post  350 195 8.0 x 8.3   $261
S2D-24B3-0808-150-P 700 Rect Post  150 260 8.0 x 8.3 Top down $261
S2D-24B3-0808-350-P 700 Rect Post  350 260 8.0 x 8.3 Top down $261
S2D-24C2-0808-150-P 600 Hex Post 150 165 8.0 x 8.3 Top down $261
S2D-24C2-0808-350-P 600 Hex Post 350 165 8.0 x 8.3 Top down $261
S2D-24C3-0808-150-P 700 Hex Post 150 220 8.0 x 8.3 Top down $261
S2D-24D2-0808-150-P 600 Hex Hole 150 180 8.0 x 8.3 Top down $261
S2D-24D2-0808-350-P 600 Hex Hole 350 180 8.0 x 8.3 Top down $261
S2D-24D3-0808-150-P 700 Hex Hole 150 290 8.0 x 8.3 Top down $261
S2D-24D3-0808-350-P 700 Hex Hole 350 290 8.0 x 8.3 Top down $261
Linear Nanostamps
Part Number Period(nm) Groove Depth(nm) Duty Cycle (%) Size(mm) SEM Link 1 SEM Link 2  Price 
SNS-C11.7-1212-200-P 855 200 50 12.5 x 12.5     $261
SNS-C11.7-2525-200-P 855 200 50 25.0 x25.0     $528
SNS-C14.3-0808-150-D45-P 700 150 47 8.0 x 8.3   Top down $261
SNS-C14.3-0808-150-D55-P 700 150 55 8.0 x 8.3   Top down $261
SNS-C14.3-0808-350-D45-P 700 350 47 8.0 x 8.3   Top down $261
SNS-C14.3-0808-350-D55-P 700 350 55 8.0 x 8.3   Top down $261
SNS-C14.8-2410-170-P 675 170 32 24.0 x 10.0     $328
SNS-C14.8-2430-170-P 675 170 32 24.0 x 30.4     $528
SNS-C14.8-5050-170-P 675 170 32 50 x 50     $1,932
SNS-C16.5-2912-190-P 606 190 50 29.15 x 12.15 X-sec Top down $328
SNS-C16.5-2924-190-P 606 190 50 29.15 x 24.35 X-sec Top down $528
SNS-C16.5-5050-190-P 606 190 50 50.0 x 50.0 X-sec Top down $2,167
SNS-C16.7-0808-150-D45-P 600 150 43 8.0 x 8.3   Top down $261
SNS-C16.7-0808-150-D55-P 600 150 55 8.0 x 8.3   Top down $261
SNS-C16.7-0808-350-D45-P 600 350 43 8.0 x 8.3   Top down $261
SNS-C16.7-0808-350-D55-P 600 350 55 8.0 x 8.3   Top down $261
SNS-C18-2009-110-D29-P 555 110 29 20.0 x 9.0 X-sec Top down $261
SNS-C18-2009-110-D50-P 555 110 50 20.0 x 9.0 X-sec Top down $261
SNS-C18-2009-140-D29-P 555 140 29 20.0 x 9.0 X-sec Top down $261
SNS-C18-2009-140-D50-P 555 140 50 20.0 x 9.0 X-sec Top down $261
SNS-C20-0808-150-D45-P 500 150 44 8.0 x 8.3   Top down $261
SNS-C20-0808-150-D60-P 500 150 60 8.0 x 8.3   Top down $261
SNS-C20-0808-350-D45-P 500 350 44 8.0 x 8.3   Top down $261
SNS-C20-0808-350-D60-P 500 350 60 8.0 x 8.3   Top down $261
SNS-C24-1212-110-P 417 110 50 12.5 x 12.5 X-sec Top down $261
SNS-C36-1212-110-P 278 110 50 12.5 x 12.5 X-sec Top down $261
SNS-C72-1212-50-P 139 50 50 12.5 x 12.5 X-sec Top down $328
SNS-C72-2525-50-P 139 50 50 25.0 x 25.0 X-sec Top down $1,094

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