This target provides a highly accurate reference for feature sizes of circles and squares. This target may be used in testing the accuracy of non-contact metrology systems, especially those vulnerable to distortion and blooming.
The high precision pattern is formed in standard chrome on a stable Soda Lime Glass substrate in standard microscope slide format. The pattern surface provides a high contrast against a light background, ideal for diffuse lighting or coaxial illumination applications. The pattern is on the first surface, right reading looking at the glass.
Full details and specifications are available under “Detailed Specifications” below.