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Substrate Processing |
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Master Patterns for Phototooling (Masks), one-of-a-kind deliverables
(Master as Part), and Replications are produced by EITHER:
1. ETCH AND FILL PROCESS: Etching the pattern within the substrate surface
and filling the etched areas with an opaque fill ("Etched and Filled"
Process), OR,
2. ETCHED METAL (Chrome or other) ON SUBSTRATE PROCESS: Metal is evaporative
or sputter coated onto the substrate (see COATINGS), and the clear areas
are etched away.
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ETCH AND FILL PROCESS STEPS
- Glass substrate is procured, inspected, and cleaned.
- Metal Coating applied.
- Light Sensitive Photoresist applied by spin coating or dip coating.
- Exposure of the Photoresist pattern by AUTOGRAPH or contact print
of a Photo Tool or Mask.
- Develop Photoresist and Inspect for its masking quality. Areas to
be removed will be exposed after Developing.
- Chemically Etch Metal Coating in exposed areas. Inspect remaining
metal/photoresist areas for masking qualities.
- Chemically Etch Glass substrate. Inspect etched areas for quality.
- Strip or remove both Photoresist and Metal Coating layers.
- Fill etched areas within substrate surface with epoxy or other opaque
Fill material.
- Temperature or air cure filled areas of pattern.
- Final QA inspect Master or deliverable Parts.
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ETCHED METAL ON SUBSTRATE PROCESS STEPS:
- Glass substrate is procured, inspected and cleaned.
- Metal Coating is applied. Methods included evaporation, sputtered
deposition, electron beam,CVD, and others. Typical for Chrome coating
Thin Film Thickness 1200-2000 Å.
- Light Sensitive Photo Resist applied by spin coating or dip coating.
- Exposure of the Photoresist pattern by AUTOGRAPH or contact
print of a Phototool or Mask.
- Develop Photoresist and Inspect for its masking quality. Areas to
be removed will be exposed after Developing.
- Chemically Etch Metal Coating in exposed areas.
- Strip or remove Photoresist leaving the Metal Coating layer on the
substrate surface.
- Final QA inspect Master or deliverable Parts.
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